Identification of colloidal silica polishing induced contamination in silicon

Tweddle D, Hamer P, Shen Z, Moody MP, Wilshaw PR
June 2019
Journal article
Journal:
MATERIALS CHARACTERIZATION
Volume:
152
,
pp.
239 - 244
No abstract available
Keywords:

Silicon

,

Polishing

,

Contamination

,

Atom probe tomography

,

Correlative microscopy

DOI
10.1016/j.matchar.2019.04.029
ORA record